Mode-Selective Electrode Configuration for Multifrequency Operation in PMUTs: Microfabrication and Characterization
Why this work is in the frame
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Bibliographic record
Abstract
Multi-frequency operation in ultrasonic transducers balances the trade-off between resolution and penetration depth in ultrasonic imaging. Single top-electrode PMUTs couple strongly to the fundamental mode but weakly to higher-order modes because uniform electrode coverage does not conform to the higher-mode strain profile. Dual concentric ring-and-disk (C–C) electrodes access multiple modes yet reduce fundamental-mode coupling due to misalignment between the segmented coverage and the fundamental strain profile. In this work a circular square (C-Sq) dual top electrode is introduced to strengthen coupling in both the fundamental and higher order modes for multifrequency operation. The configuration pairs a circular outer electrode with a square inner electrode on a circular membrane. The topology aligns with the strain profiles of the fundamental and a selected higher mode enabling mode selective excitation by electrode switching. The proposed C-Sq dual electrode design and reference single electrode and dual electrode concentric ring and disk (C-C) devices were fabricated using the PiezoMUMPs multi-user MEMS process for fair comparison. Electrical impedance analysis, laser doppler vibrometry, and acoustic measurements show a 37% increase in fundamental mode electromechanical coupling relative to C-C dual electrode PMUT and a 27% improvement for the higher mode relative to single electrode PMUTs. Membrane displacement increases by 67% and acoustic pressure at the fundamental resonance is enhanced by 13%. The proposed C-Sq PMUT supports efficient, mode selective multifrequency operation for biomedical imaging and sensing.[2025-0152]
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Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.001 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.001 | 0.000 |
| Bibliometrics | 0.001 | 0.001 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.001 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.001 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it