Bidirectional Electrostatic Rotary MEMS Actuator Achieving ±3.2° Angular Displacement
Why this work is in the frame
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Bibliographic record
Abstract
In this work, we present a rotary micro-electro-mechanical system (MEMS) structure utilizing an electrostatic actuation mechanism. The design comprises a set of circular-shaped springs and curved comb fingers to provide bidirectional rotation while minimizing lateral displacement. This structure was fabricated using the PiezoMumps commercial microfabrication process. An analytical model is employed to predict the behavior of the design, and is validated through finite element method (FEM) simulations and prototype measurements. The results indicate that the structure can provide both clockwise and counterclockwise displacements up to 3.2° at an actuation voltage of 170 V. A good agreement is observed between analytical, numerical, and experimental results. This structure holds great potential for applications requiring configurable features, such as photonic systems, due to its precise displacement control and low power consumption.
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Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.000 |
| Meta-epidemiology (narrow) | 0.001 | 0.001 |
| Meta-epidemiology (broad) | 0.002 | 0.001 |
| Bibliometrics | 0.001 | 0.001 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.001 | 0.002 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it