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Record W4417337040 · doi:10.1109/jmems.2025.3636382

Silicon Resonator With ppb-Level Linear Temperature Coefficient of Frequency

2025· article· W4417337040 on OpenAlex
Ashudeep, Azadeh Jafari, Abid Ali, Amirmohammad Zare, Behraad Bahreyni

Why this work is in the frame

A frame that forgets how it found something cannot be audited. These are the routes that admitted this work.

affAt least one author lists a Canadian institution in the pinned OpenAlex snapshot.
fundA Canadian funder is recorded on the work.

Bibliographic record

VenueJournal of Microelectromechanical Systems · 2025
Typearticle
Language
FieldPhysics and Astronomy
TopicMechanical and Optical Resonators
Canadian institutionsSimon Fraser University
FundersNatural Sciences and Engineering Research Council of CanadaCMC Microsystems
KeywordsTemperature coefficientResonatorSiliconWaferAtmospheric temperature rangeTemperature measurementFabricationFrequency response

Abstract

fetched live from OpenAlex

This paper presents a geometrically modified silicon resonator made from degenerately doped silicon (DD-Si) that exhibits a linear temperature coefficient of frequency (<italic xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">TCF<sub>1</sub> </i>) of + 23 ppb/°C. A combination of additive and subtractive geometrical modifications is applied to bulk-mode resonators fabricated on n-type silicon wafer with phosphorus doping concentration of <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$9.34\times 10^{19}$</tex-math> </inline-formula> cm<sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">−3</sup>. The approach is broadly applicable to silicon resonators for passive compensation of their temperature coefficients of frequency (<italic xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">TCFs</i>) and is demonstrated to achieve first order of temperature insensitivity without adding fabrication complexity. The temperature-dependent response of DD-Si is analyzed for these modified designs. This resonator’s extracted quadratic temperature coefficient of frequency (<italic xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">TCF<sub>2</sub> </i>) is around -10 ppb/°C<sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup>. Combined, the device demonstrates a turnover temperature around 26°C, with a total frequency variation of approximately 38 ppm across the temperature range of -<inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$35~^{\circ }$</tex-math> </inline-formula>C to <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$+ 85~^{\circ }$</tex-math> </inline-formula>C.[2025-0120]

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.002
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesMeta-epidemiology (narrow)
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.183
Threshold uncertainty score1.000

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0020.000
Meta-epidemiology (narrow)0.0010.001
Meta-epidemiology (broad)0.0020.001
Bibliometrics0.0000.001
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0010.000
Research integrity0.0010.002
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.009
GPT teacher head0.243
Teacher spread0.233 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it