REMOVING 20 NM PARTICLES USING A SUPERSONIC ARGON PARTICLE BEAM GENERATED WITH A CONTOURED LAVAL NOZZLE
Bibliographic record
Abstract
A cryogenic particle beam is an effective means of removing nano-sized contaminant particles, but the particle beam generated with a simple-hole nozzle has not been successful in removing particles smaller than 30 nm. Based on molecular dynamics (MD) simulation results that smaller cryogenic particles moving at a higher velocity are more effective in removing contaminant particles in the 10 nm range, a contoured Laval nozzle of a particular expansion angle and length was used in this study, instead of the simple-hole nozzle, to generate particle beams of high intensity and controlled size moving at high velocities. A variety of particle size and velocity were obtained by controlling the stagnation pressure/temperature and the back pressure, and using Laval nozzles with differing throat sizes and expansion angles. The new particle beams could remove almost completely a variety of ceramic and Cu particles, down to 20 nm size range, on a flat surface or in trenches. (C) Koninklijke Brill NV, Leiden, 2009
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.001 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.006 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".