Laser oxidized Sn/In films for microlithography applications
Bibliographic record
Abstract
This thesis reports a new kind of laser oxidized inorganic film, Snlh film, which has unique properties and could be used as a direct-write mask, greyscale mask, anisotropic etch mask and patterned IT0 film in microelectronic manufacture.Upon exposure to laser light the film's Optical Density (OD) drops from 3 OD to 0.24 OD, and the OD decreases almost linearly with laser power.Profilometry, XRD, TEM and EI>X results show that the OD change is caused by an oxidation process.Binary and greyscale masks were successfully created by using these films.The film has a similar structure to IT0 film and can be used to replace deposited IT0 film.Since the exposed film has a much lower etch rate compared to Si, it can also be used in anisotropic masks.Patterns and trenches on Si(100) wafer were successfully created.3.4.5Transmission Electron Microscopy (TEM) ...................
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.002 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".