Laser oxidized Sn/In films for microlithography applications
Why this work is in the frame
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Bibliographic record
Abstract
This thesis reports a new kind of laser oxidized inorganic film, Snlh film, which has unique properties and could be used as a direct-write mask, greyscale mask, anisotropic etch mask and patterned IT0 film in microelectronic manufacture. Upon exposure to laser light the film's Optical Density (OD) drops from 3 OD to 0.24 OD, and the OD decreases almost linearly with laser power. Profilometry, XRD, TEM and EI>X results show that the OD change is caused by an oxidation process. Binary and greyscale masks were successfully created by using these films. The film has a similar structure to IT0 film and can be used to replace deposited IT0 film. Since the exposed film has a much lower etch rate compared to Si, it can also be used in anisotropic masks. Patterns and trenches on Si(100) wafer were successfully created.
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Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.001 | 0.001 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.001 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it