Characterization of electronically active defects in hafnium dioxide high-[kappa] gate dielectrics
Bibliographic record
Abstract
The trapping behaviour of electronic defects in high-r, HfO2, metal-oxide- semiconductor (MOS) capacitors was investigated using capacitance-voltage and photocurrent-voltage (photo IV) measurements.The tested capacitors had a semi- transparent aluminum gate, HfO2 deposited by metal-organic chemical vapour deposition, a SiO* intermediate layer, and a lightly doped (1x101s cm-3) p-type silicon substrate.Internal photoemission was used to inject electrons from the gate and substrate electrodes for the charge injection study.The centroid of the oxide trapped charge was extracted from photo IV measurements, which conf,rmed that electrons are readily trapped by and detrapped from a large densþ of pre-existing defects (> 1012 cm-3; in the bulk HfOz layer.The effective density of trapped charge was highly dependent on stress voltage and was modeled using first-order trapping kinetics with two defects having different capture cross-sections.The results from this work validate the use of the photo IV technique for high-r MOS characterization.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".