Comparative analysis of single-mode silicon nitride microring resonators at telecom wavelengths and TE and TM polarization for refractive index sensors
Bibliographic record
Abstract
We evaluate the refractive index sensing performance of moderate-confinement silicon nitride ( Si 3 N 4 ) microring resonators operating at 1310 and 1550 nm under both TE and TM polarizations. The Si 3 N 4 devices are fabricated through a commercial rapid prototyping process using direct-write electron beam lithography in a silicon photonics foundry. Using 0.4 µm thick Si 3 N 4 strip microring resonators to sense sodium chloride (NaCl) solutions, we demonstrate bulk sensitivities of 127.77 and 221.36 nm/RIU for 1310 and 1550 nm wavelengths, respectively, under TE polarization, as well as 155.77 and 266.63 nm/RIU for 1310 and 1550 nm wavelengths, respectively, under TM polarization. The intrinsic quality factors with deionized water (DI water) on top of the microring resonator are 1.3×10 5 and 1.2×10 4 at 1310 and 1550 nm wavelengths, respectively, for the TE-polarized mode device, as well as 5.4×10 4 and 7.3×10 3 at 1310 and 1550 nm wavelengths for the TM-polarized mode device. Our Si 3 N 4 microring resonator sensor maintains superior quality factors even upon exposure to NaCl salt solutions compared to silicon designs. This corresponds to intrinsic limits of detection of 7.8×10 −5 and 5.8×10 −4 RIU at 1310 and 1550 nm, respectively, under TE polarization, and 1.5×10 −4 and 7.9×10 −4 RIU at 1310 and 1550 nm, respectively, under TM polarization, corresponding to NaCl concentration detection limits in the low millimolar range. Overall, our devices exhibit comparable sensitivity and limit of detection compared with previously reported Si 3 N 4 strip microring sensors, demonstrating the effectiveness of the 0.4 µm thick platform. These results highlight the potential of moderate-confinement Si 3 N 4 microring resonators for biosensing, emphasizing their versatility and compatibility with existing photonic technologies at key telecom wavelengths.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.001 |
| Meta-epidemiology (narrow) | 0.001 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".