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Record W7143263853

Piezoelectrically driven MEMS cantilever-based sensors for gas detection

2025· article· en· W7143263853 on OpenAlexaff
Jana Marie Meyer, Lars Blohm, Manuel Buriks, Christian Eisermann, Lawrence Nsubuga, Tatiana Lisbôa Marcondes, Roana de Oliveira Hansen, Fabian Lofink

Bibliographic record

VenueUniversity of Southern Denmark Research Portal (University of Southern Denmark) · 2025
Typearticle
Languageen
FieldPhysics and Astronomy
TopicMechanical and Optical Resonators
Canadian institutionsInnovation Cluster (Canada)
Fundersnot available
KeywordsMicroelectromechanical systemsCantileverFabricationResonance (particle physics)WaferSIGNAL (programming language)Adsorption
DOInot available

Abstract

fetched live from OpenAlex

Gas sensors based on piezoelectrically driven MEMS cantilevers present a promising solution for the sensitive detection of volatile organic compounds, particularly in food freshness monitoring, such as meat and fish. The operational principle relies on the adsorption of gas molecules, which alters the cantilever's resonance frequency and deflection, allowing for quantification of gas concentration through a dynamic approach that employs an AC signal at the cantilever's resonance frequency. The fabrication of the MEMS sensors is performed on 200 mm wafers, followed by functionalization with a binder solution tailored for cadaverine. The fabrication steps are monitored inline, and a resonance frequency measure-ment can be conducted on wafer level. Simulation studies further refine the understanding of how the binder's weight affects resonance frequency, especially with a different cantilever thickness.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

How this classification was reachedexpand

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.001
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesMeta-epidemiology (narrow), Insufficient payload (model declined to judge)
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Qualitative · Consensus signal: none
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.621
Threshold uncertainty score1.000

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0010.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0010.001
Bibliometrics0.0010.001
Science and technology studies0.0010.001
Scholarly communication0.0000.000
Open science0.0010.000
Research integrity0.0000.001
Insufficient payload (model declined to judge)0.0060.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.017
GPT teacher head0.246
Teacher spread0.229 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Classification

machine, unvalidated

Machine predicted; a candidate call from one teacher head, not a consensus.

Study designQualitative
Domainnot available
GenreEmpirical

How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".

Quick stats

Citations0
Published2025
Admission routes1
Has abstractyes

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