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Development of a reliable low cost NMOS process for microfabrication courses and proof-of-concepts in research

2009· article· en· W981535933 on OpenAlexaff
Benoît-Louis Bérubé, Serge A. Charlebois

Bibliographic record

Venuenot available
Typearticle
Languageen
FieldEngineering
TopicAdvancements in Semiconductor Devices and Circuit Design
Canadian institutionsUniversité de Sherbrooke
Fundersnot available
KeywordsNMOS logicMicrofabricationElectronicsProcess (computing)Computer scienceElectrical engineeringSet (abstract data type)AmplifierMicroelectromechanical systemsDie (integrated circuit)Electronic engineeringComputer hardwareEngineeringCMOSMaterials scienceNanotechnologyVoltageOperating systemTransistorFabrication

Abstract

fetched live from OpenAlex

We present a low cost NMOS technology designed to support undergraduate and graduate microfabrication and device physics courses. This 6 mask process is intended to be reliably fabricated in a broad access university facility using undedicated equipment. One set of cells has been designed for process characterization (including statistical analysis) and device physics analysis. A second set of cells comprises basic logic gates, binary counters and analog circuit elements including an operational amplifier. In addition to teaching purposes, the technology aims at enabling the integration of Si electronic technologies (either as control or as front-end electronic) with other technologies such as single electronics (SET), biosensors and MEMS. This is accomplished by allowing the NMOS process to be done either before or after the other technology of interest which cannot be done using commercial Si processes.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

How this classification was reachedexpand

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: none
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.532
Threshold uncertainty score0.248

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0000.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.096
GPT teacher head0.398
Teacher spread0.302 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Classification

machine, unvalidated

Machine predicted; a candidate call from one teacher head, not a consensus.

The models applied no category: nothing in the taxonomy fit this work.
Study designBench or experimental
Domainnot available
GenreEmpirical

How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".

Quick stats

Citations1
Published2009
Admission routes1
Has abstractyes

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