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Thick THB sacrificial layer and metal encapsulation process

2009· article· en· W984154779 on OpenAlex

Why this work is in the frame

A frame that forgets how it found something cannot be audited. These are the routes that admitted this work.

affAt least one author lists a Canadian institution in the pinned OpenAlex snapshot.

Bibliographic record

Venuenot available
Typearticle
Languageen
FieldEngineering
Topic3D IC and TSV technologies
Canadian institutionsUniversity of Alberta
Fundersnot available
KeywordsMaterials scienceWaferResistEncapsulation (networking)Microelectromechanical systemsOptoelectronicsLayer (electronics)Wafer-level packagingNanotechnologyComputer science

Abstract

fetched live from OpenAlex

Here, THB as a sacrificial layer has been characterized and used to develop a metal encapsulating process. The idea in combination with conventional thin film processes is vey helpful for thick monolithic wafer-level packaging of RF MEMS devices allowing a vertical space of as large as 100 µm for the devices to freely actuate. In this method, a very thick layer of THB 151N photo resist (100µm) in combination of thin films (1 µm–5 µm) is employed to serve as encapsulation. This thick layer is removed at the end of the process leaving a very spacious cavity. The proposed technique helps in advancing monolithic packaging field and increasing the thickness considerably.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Other design · Consensus signal: none
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.634
Threshold uncertainty score0.182

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0000.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.012
GPT teacher head0.229
Teacher spread0.217 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Quick stats

Citations5
Published2009
Admission routes1
Has abstractyes

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