PECVD Silicon Nitride-Based Multilayers with Optimized Mechanical Properties
Pourquoi ce travail est dans la base
Une base qui oublie comment elle a trouvé un travail ne peut pas être vérifiée. Voici les voies qui ont admis celui-ci.
Notice bibliographique
Résumé
Silicon nitride (SiN) based films deposited by plasma-enhanced chemical vapor deposition (PECVD) have interesting optical, mechanical, and chemical properties. They are used for applications such as anti-reflective coatings and surface passivation layers in solar cells. Amorphous SiN-based films also are frequently used to create multilayer structures of alternatingly high-index and low-index films. This approach is very promising to fabricate narrow-bandwidth notch filters on photovoltaic cells to reflect on demand a wide variety of colors over the entire visible spectrum [1]. However, these multilayer structures need to be highly durable and mechanically stable since the lifecycle of photovoltaic cells in some applications [2] is very long, and the coated surfaces are very large. To satisfy these specific functional requirements, we need to adjust the films' optical and mechanical properties by changing the deposition parameters of a PECVD reactor. For instance, it is possible to strongly influence the chemical composition of amorphous SiN-based films, such as their stoichiometry, by tuning the gas flows [3]. This work investigates the effect of the deposition pressure, power, and source gas ratio on SiN-based monolayers during plasma deposition. We have deposited SiN and silicon oxynitride (SiON) films in an electron cyclotron resonance (ECR) PECVD reactor using a SiH 4 /N 2 /O 2 /Ar precursor mixture. We have measured the refractive index and the absorption of the films using a variable angle spectroscopic ellipsometry (VASE) to assess their optical quality. The mechanical properties of the films, such as residual stress and coefficient of thermal expansion, were measured ex-situ on a KLA-Tencor FLX-2320 film stress measurement system. The Young's modulus and hardness of the films were evaluated using nanoindentation. After studying the properties of monolayers, we have made numerical simulations and further characterizations to optimize the design of multilayer structures considering both the optical and mechanical properties. Through this discussion, we try to better understand the interactions taking place when amorphous SiN-based films with different structural properties and compositions are stacked on top of each other. Finally, we suggest methods to predict and control the residual stress in multilayer structures without affecting the optical properties. References: [1] S. Lee et al. , "RGB-Colored Cu(In,Ga)(S,Se) 2 Thin-Film Solar Cells with Minimal Efficiency Loss Using Narrow-Bandwidth Stopband Nano-Multilayered Filters," ACS Appl. Mater. Interfaces , vol. 11, no. 10, pp. 9994–10003, Mar. 2019. [2] G. Ban-Weiss, C. Wray, W. Delp, P. Ly, H. Akbari, and R. Levinson, "Electricity production and cooling energy savings from the installation of a building-integrated photovoltaic roof on an office building," Energy Build. , vol. 56, pp. 210–220, 2013. [3] D. B. Bonneville, J. W. Miller, C. Smyth, P. Mascher, and J. D. B. Bradley, "Low-temperature and low-pressure silicon nitride deposition by ecr-pecvd for optical waveguides," Appl. Sci. , vol. 11, no. 5, pp. 1–11, 2021.
Récupéré en direct depuis OpenAlex et désinversé. Les résumés ne sont pas conservés dans cette base de données : les index inversés représentent 8,6 Go des 9,3 Go de texte de la base, et le serveur dispose de 13 Go libres.
Prédiction distillée sur la base complète
Imitation des enseignantsNi prévalence calibrée, ni vérité terrain. Validation humaine à venir. Apprise à partir de 10 348 étiquettes directes de Codex et de 10 348 étiquettes directes de Gemma. Le mode candidate est l'union des têtes enseignantes seuillées; le consensus est leur intersection. Ces sorties portent le statut machine_predicted_unvalidated et ne sont ni des étiquettes humaines ni des étiquettes directes de modèles de pointe.
Scores Codex et Gemma par catégorie
| Catégorie | Codex | Gemma |
|---|---|---|
| Métarecherche | 0,000 | 0,000 |
| Méta-épidémiologie (sens strict) | 0,000 | 0,000 |
| Méta-épidémiologie (sens large) | 0,000 | 0,000 |
| Bibliométrie | 0,000 | 0,000 |
| Études des sciences et des technologies | 0,000 | 0,000 |
| Communication savante | 0,000 | 0,000 |
| Science ouverte | 0,000 | 0,000 |
| Intégrité de la recherche | 0,000 | 0,001 |
| Charge utile insuffisante (le modèle a refusé de juger) | 0,000 | 0,000 |
Scores machine (provisoires)
Les deux têtes enseignantes du modèle étudiant, lues sur ce travail. Un score ordonne la base pour la relecture; il n'affirme jamais une catégorie, et le statut de validation accompagne chaque rangée tel quel.
Scores de référence d'un modèle non mature (critères de maturité non atteints, 7 itérations). Un score ordonne; il n'affirme jamais une catégorie.
score_only:v0-immature-baseline · tel quel depuis la passe de notation : score_only signifie que le nombre peut ordonner les travaux, et qu'aucune étiquette de catégorie n'en découle