Bibliographic record
Abstract
Abstract The sections in this article are Introduction Dissolution of Silicon Fluoride Solutions In Alkaline Solutions Hydrogen Evolution Dissolution Kinetics and Mechanisms Reaction Mechanisms A General Model Elementary Steps Reaction Paths Etch Rates in Various Systems General In Fluoride‐based Solutions Absence of Oxidants Effect of CrO 3 Addition Effect of HNO 3 Addition Addition of Other Oxidants Alkaline Solutions KOH Solutions Reaction Kinetics Other Inorganic Solutions Hydrazine Organic Solutions EDP Solutions Etching Reactions Ethanolamine Tetramethyl Ammonium Hydroxide ( TMAH ) Etch Rate Reduction of Heavily Doped Materials Mechanism Anisotropic Etching Rate‐Limiting Process Mechanism of Anisotropic Etching A General Model for both HF and KOH Solutions Basic Features of Anisotropically Etched Surfaces Surface Roughness Microroughness Macroroughness Crystallographic Characters and Formation of Hillocks Origins of Roughness Applications of Etching Cleaning RCA Cleaning Defect Etching Material Removal Uniform Material Removal Selective Material Removal
Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.
How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.001 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.001 | 0.000 |
| Insufficient payload (model declined to judge) | 0.002 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".