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Record W1590677570 · doi:10.1116/1.1648671

Characterization of GaAs1−xNx epitaxial layers by ion beam analysis

2004· article· en· W1590677570 on OpenAlexaff
P. S. Wei, M. Chicoine, S. C. Gujrathi, F. Schiettekatte, J.-N. Beaudry, R. A. Masut, P. Desjardins

Bibliographic record

VenueJournal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2004
Typearticle
Languageen
FieldEngineering
TopicSemiconductor materials and devices
Canadian institutionsPolytechnique MontréalUniversité de Montréal
Fundersnot available
KeywordsElastic recoil detectionNuclear reaction analysisEpitaxyRutherford backscattering spectrometryIon beam analysisAnalytical Chemistry (journal)Transmission electron microscopyMaterials scienceIon beamStoichiometryIonMolecular beam epitaxyMass spectrometrySecondary ion mass spectrometryDiffractionElectron diffractionLayer (electronics)Thin filmChemistryOpticsNanotechnology

Abstract

fetched live from OpenAlex

GaAs 1−x N x epitaxial layers grown on (001) GaAs substrates by metal organic vapor phase epitaxy, with x ranging from 0.01 to 0.036, were characterized by ion beam analysis. The layers thickness and quality were measured by Rutherford backscattering spectrometry (RBS) in channeling mode. The channeling results confirm that GaAs1−xNx epitaxial layers are of high crystalline quality, in agreement with high resolution x-ray diffraction and transmission electron microscopy analyses. For the sample with x=0.036, the results reveal a 0.7 at. % of misplaced (or highly locally strained) Ga or As atoms. More than 80% of nitrogen atoms in this layer occupy substitutional sites, as determined by the N14(α,p)17O nuclear reaction analysis (NRA). Furthermore, RBS analyses using a 5 MeV O3+ probe beam reveal measurable departures from III–V stoichiometry near the surface, which remains unexplained. Finally, the total content of nitrogen in the layers measured both by NRA and elastic recoil detection by time-of-flight are compared with the results obtained by secondary ion mass spectrometry.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

How this classification was reachedexpand

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.001
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.008
Threshold uncertainty score0.554

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0010.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0010.002
Science and technology studies0.0000.000
Scholarly communication0.0000.001
Open science0.0000.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.005
GPT teacher head0.207
Teacher spread0.202 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Classification

machine, unvalidated

Machine predicted; a candidate call from one teacher head, not a consensus.

The models applied no category: nothing in the taxonomy fit this work.
Study designBench or experimental
Domainnot available
GenreEmpirical

How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".

Quick stats

Citations5
Published2004
Admission routes1
Has abstractyes

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