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Record W1622143260 · doi:10.1063/1.1864247

Copper nanopattern on SiO2 from sputter etching a Cu∕SiO2 interface

2005· article· en· W1622143260 on OpenAlex

Why this work is in the frame

A frame that forgets how it found something cannot be audited. These are the routes that admitted this work.

affAt least one author lists a Canadian institution in the pinned OpenAlex snapshot.

Bibliographic record

VenueApplied Physics Letters · 2005
Typearticle
Languageen
FieldEngineering
TopicIon-surface interactions and analysis
Canadian institutionsUniversity of Alberta
Fundersnot available
KeywordsEtching (microfabrication)SputteringMaterials scienceSubstrate (aquarium)Layer (electronics)NanostructureSputter depositionCopperIsotropic etchingArgonThin filmNanotechnologyOptoelectronicsAnalytical Chemistry (journal)MetallurgyChemistry

Abstract

fetched live from OpenAlex

We have observed a Cu nanostructure self-assembled on a SiO2 substrate during ion beam etching the Cu∕SiO2 interface. We have deposited a thin Cu layer on a glass substrate and etched the deposited layer by a neutralized argon ion beam. At the stage when almost all metal is removed by etching, we have observed an ∼20-nm-sized Cu pattern on the substrate. By atomistic Monte Carlo simulations we have demonstrated that during sputter etching, a morphology self-organizes on the surface of the Cu layer whose size and shape matches the observed Cu nanostructure. We conclude that the observed Cu nanopattern on the substrate results from the surface morphology developed by sputter instability during etching of the deposited layer.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesMeta-epidemiology (narrow), Insufficient payload (model declined to judge)
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.241
Threshold uncertainty score1.000

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0000.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0000.002

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.006
GPT teacher head0.208
Teacher spread0.202 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it