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Record W1634484921 · doi:10.1063/1.3160209

Effect of Gate Dielectric to the Threshold Voltage of 65 nm NMOS Structure

2009· article· en· W1634484921 on OpenAlexaff
M. Y. Yunus, M. Rusop, Tetsuo Soga

Bibliographic record

VenueAIP conference proceedings · 2009
Typearticle
Languageen
FieldEngineering
TopicSemiconductor materials and devices
Canadian institutionsSciencetech (Canada)
FundersUniversiti Teknologi MalaysiaUniversiti Teknologi MARA
KeywordsNMOS logicThreshold voltageGate oxideMaterials scienceOptoelectronicsOxideTransistorGate dielectricOverdrive voltageVoltageDielectricEquivalent oxide thicknessMOSFETElectrical engineeringEngineering

Abstract

fetched live from OpenAlex

With the intention of approaching to a technology of 65 nm, many parameters were changed as a step to fabricate the device. The gate oxide thickness was one of the parameters that have been observed. In this project, Silvaco TCAD tools were used to find the optimum value of threshold voltage for 65 nm technology nMOS transistor. The silicon dioxide (SiO2) was used to growth the gate oxide by adjusted the time and temperature of the oxidation process. The thickness of gate oxide was varied from 30 Å to 100 Å and the results were tabulated and observed. As the gate oxide thickness increase, the value of threshold voltage was increased. By using Silvaco TCAD Tools, the results show that the optimum value of threshold voltage is 0.26 V. The value is in the range with ITRS guideline for 65 nm device.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

How this classification was reachedexpand

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.005
Threshold uncertainty score0.454

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0000.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.008
GPT teacher head0.225
Teacher spread0.216 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Classification

machine, unvalidated

Machine predicted; a candidate call from one teacher head, not a consensus.

The models applied no category: nothing in the taxonomy fit this work.
Study designBench or experimental
Domainnot available
GenreEmpirical

How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".

Quick stats

Citations0
Published2009
Admission routes1
Has abstractyes

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