High-quality percussion drilling of silicon with a CW fiber laser
Bibliographic record
Abstract
It has been shown that 30 ns FWHM duration pulses from a MOPA fiber laser (wavelength: 1064 nm) cleanly micromachines silicon with little cracking or heat-affected zone1. In this paper, we show that similar results can be achieved using a 1070 nm quasi-continuous wave laser pulsed with a 6.6 μs duration (average power: 2.8 W) in combination with coaxially delivered nitrogen assist gas. The holes are cut at a 5 kHz repetition rate with a resulting diameter on the order of 15 μm and an etch rate of up to 18 μm/pulse. Hole size is increased for longer pulses and the heat-affected zone broadens to greater than 25 μm with no assist gas. By combining low coherence microscopy with machining, we depth image the machining front and obtain in situ images during and after the drilling process showing rich cut dynamics in real time.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".