Fabrication of new Interdigital Transducers for Surface Acoustic Wave Device
Why this work is in the frame
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Bibliographic record
Abstract
We investigate high-performance interdigital transducers (IDTs) for the generation of surface acoustic waves (SAWs) on AT-cut quartz, where the metal fingers are embedded in the substrate. Three micromachining techniques are used to manufacture SAW structures, namely an inductively coupled plasma, a laser etching and a reactive ion etching. An evaporated layer of Al and a Ni thick electroplating are used to grow the metals in the micromachining structures. A chemical mechanical polishing (CMP) technique is used to remove the exceeding metal and keep a flat surface. The electrical characterizations indicate that the fabricated devices are suited for sensing proposes with a low insertion loss and a linear phase. Results are reported emphasizing the efficiency of the Ni damascene process to manufacture SAW sensors with the embedded structures.
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Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it