Dual-frequency plasma deposition of high quality insulating thin films
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Bibliographic record
Abstract
Dual-mode microwave/radiofrequency PECVD processes have been used for the fabrication of four types of amorphous dielectric films: SiN/sub 1.3/, SiO/sub 2/, a-C:H, and plasma-polymerized hexamethyldisiloxane (PP-HMDSO). For each of these materials, we have determined values of the critical average ion energy E~/sub i/ (between about 70 and 170 eV) and of the critical ion flux, which characterize the transition from a porous to a densely packed microstructure, at low (/spl sim/25/spl deg/C) substrate temperature T/sub s/ and high deposition rates (between 20 and 120 /spl Aring//s). When E~/sub i/ values are optimized, the d.c. resistivity and the dielectric loss tangent values for all of these dielectrics are found to be about 10/sup 16/ /spl Omega/ cm and 10/sup -3/, respectively. We present evidence which shows that E~/sub i/ and T/sub s/ can be considered as interchangeable process parameters. Large area scale-up and continuous deposition onto flexible substrate materials are also discussed.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">></ETX>
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Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.009 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it