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Record W1879288613 · doi:10.1109/drc.2005.1553082

Application of carbon nanotubes in nano-lithography and nano-electronics

2005· article· en· W1879288613 on OpenAlexaff
Yaser Abdi, S. Mahajerzadeh, H. Hosseinzadegan, Davood Shahrjerdi, M. Robertson, J.C. Bennett

Bibliographic record

Venuenot available
Typearticle
Languageen
FieldMaterials Science
TopicCarbon Nanotubes in Composites
Canadian institutionsAcadia University
Fundersnot available
KeywordsCarbon nanotubeMaterials scienceElectron-beam lithographyNanotechnologyNano-LithographyNanolithographyStencil lithographySiliconEvaporationFabricationElectron beam physical vapor depositionNanoelectronicsOptoelectronicsChemical vapor depositionResistLayer (electronics)Composite material

Abstract

fetched live from OpenAlex

We report a novel sub-micron, nano-lithography technique based on carbon nanotubes (CNTs). Vertically aligned CNTs are used to emit a collimated electron beam capable of generating patterns at the nano-scale regime. The encapsulation of CNTs in oxide and metal is the main feature of this approach and allows the formation of a sharp electron beam without the need of an external electrostatic or magnetic lens. The fabrication process starts with the deposition of a 5-10 nm thick Ni seed layer on (100) silicon substrates using e-beam evaporation and the Ni-coated substrates are placed in a DC-PECVD unit to grow the vertical CNTs.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

How this classification was reachedexpand

Full frame machine prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: metacan-v3-hybrid-931329e0061cValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Methods · Consensus signal: Methods
Teacher disagreement score0.001
Threshold uncertainty score0.005

Distilled classifier scores by category (both heads)

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0000.000
Research integrity0.0010.000
Insufficient payload (model declined to judge)0.0010.001

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.005
GPT teacher head0.231
Teacher spread0.226 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Classification

machine, unvalidated

Machine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.

The models applied no category: nothing in the taxonomy fit this work.
Study designBench or experimental
Domainnot available
GenreMethods

How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".

Quick stats

Citations1
Published2005
Admission routes1
Has abstractyes

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