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Record W1881469964 · doi:10.1002/sia.4849

Depth profiling of NbxO/W multilayers: effect of primary ion beam species (O2 <sup>+</sup> , Ar <sup>+</sup> and Cs <sup>+</sup> )

2012· article· en· W1881469964 on OpenAlex

Why this work is in the frame

A frame that forgets how it found something cannot be audited. These are the routes that admitted this work.

affAt least one author lists a Canadian institution in the pinned OpenAlex snapshot.
fundA Canadian funder is recorded on the work.

Bibliographic record

VenueSurface and Interface Analysis · 2012
Typearticle
Languageen
FieldEngineering
TopicIon-surface interactions and analysis
Canadian institutionsUniversity of Alberta
FundersUniversity of Alberta
KeywordsSputteringArgonIonAtomic physicsChemistryIon beamVacancy defectAnalytical Chemistry (journal)OxygenMaterials scienceThin filmPhysicsCrystallographyNanotechnology

Abstract

fetched live from OpenAlex

Depth profiling of Nb x O/W multilayered samples was carried out using O 2 + , Cs + or Ar + beams of different energies (2 keV, 1 keV and 0.5 keV). The obtained depth profiles showed that sputtering with O 2 + or Ar + beams can reveal the distribution of light elements, while sputtering with Cs + cannot show correctly their distribution if lower energy of 0.5 keV is applied. SRIM simulations show that changes in primary energy of sputter ions have much stronger effect on deposited energy incl. vacancy/ion and sputter yields than for oxygen and argon ion beam etching. It is suggested that O 2 + or Ar + sputter sources should be used when both light and heavy species are present in nano‐scale multilayered targets. Copyright © 2012 John Wiley &amp; Sons, Ltd.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.001
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesMeta-epidemiology (narrow)
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Simulation or modeling · Consensus signal: Simulation or modeling
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.258
Threshold uncertainty score0.999

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0010.000
Meta-epidemiology (narrow)0.0010.001
Meta-epidemiology (broad)0.0020.001
Bibliometrics0.0010.002
Science and technology studies0.0000.000
Scholarly communication0.0000.001
Open science0.0000.000
Research integrity0.0000.001
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.010
GPT teacher head0.238
Teacher spread0.228 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it