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Record W1899832544 · doi:10.1109/vmic.1990.127894

A contact electromigration study of Al-Si-Cu alloys

2002· article· en· W1899832544 on OpenAlex

Why this work is in the frame

A frame that forgets how it found something cannot be audited. These are the routes that admitted this work.

affAt least one author lists a Canadian institution in the pinned OpenAlex snapshot.

Bibliographic record

Venuenot available
Typearticle
Languageen
FieldMaterials Science
TopicCopper Interconnects and Reliability
Canadian institutionsNortel (Canada)
Fundersnot available
KeywordsElectromigrationMaterials scienceSiliconAlloyContact resistanceAluminiumMetallurgyCurrent densityCopperOptoelectronicsNanotechnologyComposite material

Abstract

fetched live from OpenAlex

With the advent of VLSI device density, new materials and technologies are being developed to ensure that interconnects and interlevel contacts are reliable. In addition to the use of Si-doped Al, barrier metallization has been introduced to prevent electromigration-induced junction spiking. To permit increased current densities, Cu has also been added to the Al alloy. It could be argued that with the use of a barrier metal, silicon in the Al alloy can be removed altogether. The experiments reported were designed to ascertain the validity of this argument. Three different aluminum alloys were investigated: Al-1%Si, Al-2%Cu, and Al-1%Si-0.5%Cu. A sample of 90 devices were tested in each case. The failure criteria chosen were a 50% increase in resistance of 50 mu A of leakage to substrate. The major failure mechanism for all three alloys was found to be resistance increase at the contact where electrons flow from the silicon into the aluminum, due to electromigration of aluminum away from the contact area. The significantly higher values of median time to failure for the two alloys containing copper reflect the higher resistance to electromigration of these alloys.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">&gt;</ETX>

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesInsufficient payload (model declined to judge)
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.049
Threshold uncertainty score0.995

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0000.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0060.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.021
GPT teacher head0.256
Teacher spread0.235 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Quick stats

Citations0
Published2002
Admission routes1
Has abstractyes

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