Very low surface recombination velocities on p- and n-type silicon wafers passivated with hydrogenated amorphous silicon films
Bibliographic record
Abstract
Outstanding surface passivation of single-crystalline p- as well as n-type silicon is obtained using hydrogenated amorphous silicon (a-Si:H) films deposited at very low temperature in a plasma-enhanced chemical vapor deposition (PECVD) system. It is demonstrated that a-Si:H films with excellent surface passivation properties can be deposited in the temperature range between 200 and 250/spl deg/C. Despite the low deposition temperature, the surface passivation of low-resistivity (/spl sim/1 /spl Omega/cm) p-type silicon provided by the films exceeds that provided by high-temperature (/spl sim/1000/spl deg/C) thermal oxides and PECVD silicon nitride films deposited at temperatures around 400/spl deg/C. A record-low surface recombination velocity (SRV) of 3 cm/s is achieved on 1.6-/spl Omega/cm p-Si. In addition, on 3.4-/spl Omega/cm n-Si wafers, very low SRVs of 7 cm/s are obtained. Investigations regarding the thermal stability of the passivation quality of the a-Si:H films show that the passivation is stable for temperatures exceeding the deposition temperature.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".