Very low surface recombination velocities on p- and n-type silicon wafers passivated with hydrogenated amorphous silicon films
Why this work is in the frame
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Bibliographic record
Abstract
Outstanding surface passivation of single-crystalline p- as well as n-type silicon is obtained using hydrogenated amorphous silicon (a-Si:H) films deposited at very low temperature in a plasma-enhanced chemical vapor deposition (PECVD) system. It is demonstrated that a-Si:H films with excellent surface passivation properties can be deposited in the temperature range between 200 and 250/spl deg/C. Despite the low deposition temperature, the surface passivation of low-resistivity (/spl sim/1 /spl Omega/cm) p-type silicon provided by the films exceeds that provided by high-temperature (/spl sim/1000/spl deg/C) thermal oxides and PECVD silicon nitride films deposited at temperatures around 400/spl deg/C. A record-low surface recombination velocity (SRV) of 3 cm/s is achieved on 1.6-/spl Omega/cm p-Si. In addition, on 3.4-/spl Omega/cm n-Si wafers, very low SRVs of 7 cm/s are obtained. Investigations regarding the thermal stability of the passivation quality of the a-Si:H films show that the passivation is stable for temperatures exceeding the deposition temperature.
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Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it