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Record W1954672870 · doi:10.1109/pvsc.2002.1190834

Very low surface recombination velocities on p- and n-type silicon wafers passivated with hydrogenated amorphous silicon films

2003· article· en· W1954672870 on OpenAlex

Why this work is in the frame

A frame that forgets how it found something cannot be audited. These are the routes that admitted this work.

fundA Canadian funder is recorded on the work.
no affNo Canadian affiliation: this work is invisible to an affiliation-only frame.
No Canadian affiliation. An affiliation-only frame, the usual design, would never have seen this work. It is one of the works that make the case for inverting the frame.

Bibliographic record

Venuenot available
Typearticle
Languageen
FieldEngineering
TopicThin-Film Transistor Technologies
Canadian institutionsnot available
FundersInstitute of Gender and Health
KeywordsPassivationPlasma-enhanced chemical vapor depositionMaterials scienceSilicon nitrideWaferSiliconAmorphous siliconChemical vapor depositionCarrier lifetimeAmorphous solidNanocrystalline siliconAnalytical Chemistry (journal)Crystalline siliconOptoelectronicsNanotechnologyLayer (electronics)CrystallographyChemistry

Abstract

fetched live from OpenAlex

Outstanding surface passivation of single-crystalline p- as well as n-type silicon is obtained using hydrogenated amorphous silicon (a-Si:H) films deposited at very low temperature in a plasma-enhanced chemical vapor deposition (PECVD) system. It is demonstrated that a-Si:H films with excellent surface passivation properties can be deposited in the temperature range between 200 and 250/spl deg/C. Despite the low deposition temperature, the surface passivation of low-resistivity (/spl sim/1 /spl Omega/cm) p-type silicon provided by the films exceeds that provided by high-temperature (/spl sim/1000/spl deg/C) thermal oxides and PECVD silicon nitride films deposited at temperatures around 400/spl deg/C. A record-low surface recombination velocity (SRV) of 3 cm/s is achieved on 1.6-/spl Omega/cm p-Si. In addition, on 3.4-/spl Omega/cm n-Si wafers, very low SRVs of 7 cm/s are obtained. Investigations regarding the thermal stability of the passivation quality of the a-Si:H films show that the passivation is stable for temperatures exceeding the deposition temperature.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.243
Threshold uncertainty score0.995

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0000.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.007
GPT teacher head0.174
Teacher spread0.167 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Quick stats

Citations87
Published2003
Admission routes1
Has abstractyes

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