X-ray reflectometry characterization of porous silicon films prepared by a glancing-angle deposition method
Bibliographic record
Abstract
The competitive growth process of ballistic deposition is studied experimentally using x-ray reflectivity characterization of silicon thin films deposited with various vapor incidence angles. Linear profiles of film density with thickness are shown to reproduce the observed reflectivity spectra. A porosity of about 10% was observed in the first few atomic layers atop the substrate, with porosity decreasing with film thickness to near zero for vapor incidence between normal and $60\ifmmode^\circ\else\textdegree\fi{}$, and porosity increasing to 50% and above for vapor incidence angles above $70\ifmmode^\circ\else\textdegree\fi{}$---the regime of glancing-angle deposition. Our results support the model of glancing deposition as sequential atomic ballistic deposition, where the observed sign change in the slope of the density profile is understood to correspond to the geometric condition where the roughening caused by self-shadowing overtakes the smoothing effects of atomic surface diffusion. From the electron-density profiles derived from x-ray reflectivity measurements, we calculate the average porosity and using data on optical indices of refraction we estimate the amount of silicon oxide.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".