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Record W1964045762 · doi:10.1116/1.2134710

Optical depth profiling of strontium titanate and electro-optic lanthanum-modified lead zirconium titanate multilayer structures for active waveguide applications

2005· article· en· W1964045762 on OpenAlexafffund
Aram Amassian, Mounir Gaidi, Mohamed Chaker, L. Martinů

Bibliographic record

VenueJournal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2005
Typearticle
Languageen
FieldEngineering
TopicSemiconductor materials and devices
Canadian institutionsInstitut National de la Recherche ScientifiquePolytechnique MontréalRegroupement Québécois sur les Matériaux de Pointe
FundersNatural Sciences and Engineering Research Council of Canada
KeywordsMaterials scienceRefractive indexLanthanumTitanateLead titanateEllipsometryThin filmStrontium titanateCrystalliteBand gapIndium tin oxideAnalytical Chemistry (journal)MineralogyOptoelectronicsFerroelectricityComposite materialDielectricNanotechnologyCeramicInorganic chemistryMetallurgy

Abstract

fetched live from OpenAlex

Transparent polycrystalline strontium titanate (STO) and lanthanum-modified lead zirconium titanate (PLZT) thin films were deposited, respectively, on Si and on indium-doped tin oxide (ITO) coated glass by pulsed laser deposition (PLD). PLZT films are shown to exhibit electro-optic properties close to the bulk material when deposited on ITO in specific process conditions. The refractive index depth profile was determined by using a combination of variable angle spectroscopic ellipsometry and spectrophotometry, and the multisample analysis approach. PLZT films deposited at high O2 pressure, PO2, and annealed at 700°C were found to be more porous and inhomogeneous than low PO2 films. The optical properties of STO films strongly depend on PO2 as well: low PO2 depositions lead to denser film growth with homogeneous, bulk-like refractive index profile, while high PO2 depositions lead to porous and highly inhomogeneous films, exhibiting band-gap variation and formation of a 60-nm-thick interdiffusion layer on Si. We use an optical depth-profiling procedure to investigate the formation of three-layer air/PLZT/STO/ITO/glass stacks, where the PLZT and STO optical properties are optimized by controlling PO2 during STO deposition, in order to form a cladding layer for potential active waveguide applications.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

How this classification was reachedexpand

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.039
Threshold uncertainty score0.628

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0000.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.012
GPT teacher head0.265
Teacher spread0.252 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Classification

machine, unvalidated

Machine predicted; a candidate call from one teacher head, not a consensus.

The models applied no category: nothing in the taxonomy fit this work.
Study designBench or experimental
Domainnot available
GenreEmpirical

How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".

Quick stats

Citations13
Published2005
Admission routes2
Has abstractyes

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