Synthesis and characterization of calixarene derivatives as resist materials for electron-beam lithography
Bibliographic record
Abstract
This article describes the electron-beam resist properties of a class of calixarene derivatives for high-resolution electron-beam lithography. The derivatives, which are based on a calix[4]resorcinarene framework, are unique in that the bridging carbon is functionalized with a long chain (C11) alkyl group. Our studies reveal that the electron-beam sensitivity of the calix[4]resorcinarenes is markedly lower than a standard calix[6]arene material, consistent with the increase in sensitivity that is observed with the number of monomers for these systems. Comparison of the sensitivity of the calix[4]resorcinarenes with four member calix[4]arenes from the literature reveals very similar values, indicating that chemical modification at the bridging carbon has no appreciable effect on sensitivity. The minimum linewidth resolution of the calix[4]resorcinarenes under our experimental conditions was found to be approximately 50nm at a threshold line dose of 65nC∕cm. Our results also demonstrate the ability to chemically modify calixarene compounds at the bridging carbon position while maintaining electron-beam sensitivity. These findings are intended to open avenues for more extensive modification schemes in developing resist materials for high-resolution electron-beam lithography.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.001 | 0.001 |
| Science and technology studies | 0.000 | 0.001 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".