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Record W1965599907 · doi:10.1115/icnmm2006-96147

Submicron Polymer Flow Cells

2006· article· en· W1965599907 on OpenAlexaff
Kristin Mandisloh, Sven Achenbach, Timo Mappes, Tilmann Rogge, Roman Truckenmueller

Bibliographic record

VenueASME 4th International Conference on Nanochannels, Microchannels, and Minichannels, Parts A and B · 2006
Typearticle
Languageen
FieldEngineering
TopicNanofabrication and Lithography Techniques
Canadian institutionsUniversity of Saskatchewan
FundersDeutsche Forschungsgemeinschaft
KeywordsMaterials scienceLithographyPolymerFluidicsFabricationPhotolithographyMicrofluidicsOptoelectronicsPhotoresistNanotechnologyComposite materialLayer (electronics)

Abstract

fetched live from OpenAlex

This paper investigates the fabrication processes of polymer micro channels integrated into flow cells. The cross sectional dimensions of these flow cell channels are in the range of microns containing structures or structure details in the submicron range. Single-component and double-component cells are presented. Single-component cells are entirely made of one polymer. They are composed of a micro structured substrate and a cover plate to hermetically seal the subjacent microfluidic structures. Flexible fluidic ports are added to facilitate interfacing. Polymethylmethacrylate (PMMA) is used as an industrially prefabricated foil (HESA®Glas VOS; HESA®Glas HESAlite). Double-component cells are made of spincoated PMMA (MicroChem 950k PMMA A11; AllResist GmbH 950k PMMA A9) that is micro structured on glass substrates prior to sealing with a cover plate. PMMA enables high resolution direct lithographic patterning of the fluidic structures. We apply Deep UV Lithography (DUV) to photochemically degrade PMMA and subsequently dissolve the degraded areas in an organic solvent. This process had previously primarily been utilized to pattern polymer waveguides. For minimum feature size devices, initial samples have been fabricated applying Deep X-Ray Lithography (DXRL) instead of DUV. Final sealing with PMMA cover plates is performed using thermal and UV bonding or solvent welding.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

How this classification was reachedexpand

Full frame machine prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: metacan-v3-hybrid-931329e0061cValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: none
Teacher disagreement score0.003
Threshold uncertainty score0.011

Distilled classifier scores by category (both heads)

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0010.001
Open science0.0010.000
Research integrity0.0000.001
Insufficient payload (model declined to judge)0.0030.001

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.014
GPT teacher head0.223
Teacher spread0.208 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Classification

machine, unvalidated

Machine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.

The models applied no category: nothing in the taxonomy fit this work.
Study designBench or experimental
Domainnot available
GenreEmpirical

How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".

Quick stats

Citations1
Published2006
Admission routes1
Has abstractyes

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Same venueASME 4th International Conference on Nanochannels, Microchannels, and Minichannels, Parts A and BSame topicNanofabrication and Lithography TechniquesFrench-language works237,207