Analysis of silicon–oxide–silicon nitride stacks by medium-energy ion scattering
Bibliographic record
Abstract
This article describes medium-energy ion scattering (MEIS) measurements of [N] and [O] profiles using protons incident on nitride–oxide (NO) films produced by oxidizing Si(100) substrates in N2O plasmas and nitride–oxide–nitride stacks formed by depositing silicon nitride on the NO films. Concentrations were obtained from the MEIS spectra using a multiparameter Marquardt–Levenberg fitting procedure. Integral [N] and [O] were separately measured by nuclear reaction analyses and compared to the concentrations obtained from the MEIS profile. The analysis shows that nitrogen diffuses through oxide films during the deposition of silicon nitride by electron–cyclotron resonance chemical-vapor deposition and accumulates at the Si/SiO2 interface.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.001 | 0.000 |
| Bibliometrics | 0.002 | 0.003 |
| Science and technology studies | 0.000 | 0.001 |
| Scholarly communication | 0.000 | 0.001 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".