Structural and chemical analysis of a model Si–SiO<sub>2</sub>interface using spatially resolved electron-energy-loss spectroscopy
Bibliographic record
Abstract
Abstract This work reports an experimental electron-energy-loss spectroscopy study carried out on a model thermal Si–SiO2 interface. Valence-loss spectra and core-loss spectra (Si L2,3 and O K edges) were recorded across the interface in line-spectrum mode with a high spatial resolution in a field emission gun scanning transmission electron microscope. From the analysis of the line spectra and on the basis of high-resolution electron microscopy and high-angle annular dark-field experiments, it is concluded that the interface is not sharp but extends over about three atomic planes consisting of Si and O atoms arranged in a structure evolving between crystalline SiO and SiO2 before growing as an amorphous SiO2 layer. In addition, from the analysis of the valence-loss spectra in terms of energy-loss function or dielectric function ε, we show that valence-electron-energy-loss spectroscopy could be a relevant alternative method for determining the electron properties, for example the bandgap, and the dielectric constant of dielectric gates on a nanometre scale. Acknowledgements We wish to thank Pierre Mur and Anne-Marie Papon, Laboratoire d'Etude des Techniques de l'Information Commissariat à l'Energie Atomique, Grenoble, who determined the model structure and prepared the TEM samples, Roland Pantel and Stephane Jullian, ST Microelectronics, Crolles, for giving us access to their FET TECNAI G2 and for their technical support when using the microscope, and Gianluigi Botton (McMaster University, Ontario, Canada), Christian Colliex (Laboratoire de Physique des Solides (LPS), Université d'Orsay, France) and David Muller (Bell Laboratories, Murray Hill, USA) for useful discussions in the course of these studies.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.001 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.001 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".