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Record W1977942845 · doi:10.1088/0960-1317/16/5/029

A femtosecond laser-induced periodical surface structure on crystalline silicon

2006· article· en· W1977942845 on OpenAlex

Why this work is in the frame

A frame that forgets how it found something cannot be audited. These are the routes that admitted this work.

affAt least one author lists a Canadian institution in the pinned OpenAlex snapshot.

Bibliographic record

VenueJournal of Micromechanics and Microengineering · 2006
Typearticle
Languageen
FieldEngineering
TopicLaser Material Processing Techniques
Canadian institutionsToronto Metropolitan University
Fundersnot available
KeywordsFemtosecondLaserMaterials scienceRippleFluenceOpticsSiliconIrradiationSurface micromachiningMicroelectronicsOptoelectronicsFabricationPhysics

Abstract

fetched live from OpenAlex

A laser-induced periodic surface structure (LIPSS) has attracted research interest for its promising potential in micromachining for microelectronics and microelectromechanical systems. A femtosecond laser-induced periodical surface structure was investigated for polished crystalline silicon. The observed structure is similar to the classical ripples that are characterized by long, nearly parallel lines extending over the entire irradiated area on the metal and silicon surface after continuous or pulsed laser irradiation. The spacing of the ripples nearly equals the irradiation wavelength. The depth of these ripples increases nonlinearly with the fluence of irradiation. The orientation of these periodic structures is perpendicular to the vector of the electric field of the laser beam. It seemed that the pattern formed by a femtosecond laser complies well with conventional models. Unlike the patterns formed by a continuous or nanosecond pulsed laser, however, the spacing of the ripple formed by femtosecond pulses is not influenced by the incident angle of the laser beam. The formula used to predict the ripple spacing in the conventional model does not apply to the femtosecond laser induced ripple structure. A plausible explanation to this phenomenon is proposed. The effect of the pulse repetition rate was studied and it was found that a femtosecond laser oscillator generates the same periodic structure as the amplified laser system.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.011
Threshold uncertainty score0.931

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0000.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.004
GPT teacher head0.175
Teacher spread0.172 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it