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Record W1979889653 · doi:10.1063/1.4812475

ZrO<sub>2</sub> on GaN metal oxide semiconductor capacitors via plasma assisted atomic layer deposition

2013· article· en· W1979889653 on OpenAlexaff
Patrick von Hauff, Amir Afshar, A. Foroughi‐Abari, Kyle M. Bothe, Ken Cadien, Douglas W. Barlage

Bibliographic record

VenueApplied Physics Letters · 2013
Typearticle
Languageen
FieldEngineering
TopicSemiconductor materials and devices
Canadian institutionsUniversity of Alberta
Fundersnot available
KeywordsAtomic layer depositionMaterials scienceCapacitorOxideCapacitanceHysteresisAnalytical Chemistry (journal)Layer (electronics)Wide-bandgap semiconductorOptoelectronicsMetalDeposition (geology)SemiconductorElectrodeNanotechnologyChemistryVoltageMetallurgyCondensed matter physicsElectrical engineering

Abstract

fetched live from OpenAlex

ZrO2 has been deposited on GaN by Atomic Layer Deposition. Multiple Metal-Oxide-Semiconductor Capacitors with 4.4 nm, 5.4 nm, and 8.5 nm of ZrO2 oxide were fabricated with Cr electrodes. Capacitance measurements produce capacitance densities as high as 3.8 μF/cm2. Current densities of 0.88 A/cm2 at 1 V for the 4.4 nm oxides and hysteresis values of less than 6 mV were observed for the 5.8 nm oxide, indicating an interfacial Dit not greater than 6.4 × 1010 cm2. Temperature dependent current measurements revealed no signature Poole-Frankel component. Comprehensive assessment of these measurements indicates a low defect density oxide formed on GaN with a low number of interface states.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

How this classification was reachedexpand

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesMeta-epidemiology (narrow), Insufficient payload (model declined to judge)
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.004
Threshold uncertainty score1.000

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0000.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0000.001

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.011
GPT teacher head0.186
Teacher spread0.175 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Classification

machine, unvalidated

Machine predicted; a candidate call from one teacher head, not a consensus.

Study designBench or experimental
Domainnot available
GenreEmpirical

How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".

Quick stats

Citations15
Published2013
Admission routes1
Has abstractyes

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