A tunable radio frequency MEMS inductor using MetalMUMPs
Bibliographic record
Abstract
This paper presents a tunable inductor for radio frequency applications. The inductor is built using the commercial process MetalMUMPs. The tuning principle is based on the change of the area of a loop inductor. The loop is formed by two pre-bent beams where one end is anchored and the second end is attached to an array of thermal flexure actuators. Upon actuation, the beams buckle and the area of the loop increases, therefore increasing the inductance of the loop. To reduce the substrate loss and thus increase the quality factor of the inductor, the silicon underneath the loop is etched away. A detailed mechanical and electrical analysis is conducted to predict the tuning range of the inductor using analytical methods and simulation tools such as Coventorware and HFSS. Measured results are obtained to prove the concept of the design. The achieved ratio of the maximum inductance to the minimum inductance is 2.1.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".