Millimeter-sized nanomanipulator with sub-nanometer positioning resolution and large force output
Bibliographic record
Abstract
Nanomanipulation in space-limited environments (e.g., inside SEM, and particularly in TEM) requires small-sized nano manipulators that are capable of producing sub-nanometer positioning resolutions and large output forces. This paper reports on a millimeter-sized MEMS (microelectromechanical systems) based nano manipulator with a positioning resolution of 0.15 nm and a motion range of plusmn2.55 mum. An amplification mechanism is employed to convert input displacements, generated by conventional electrostatic comb-drive microactuator, to achieve a high positioning resolution on the output side. The device has a high load driving capability, driving a load as high as 98 muN without sacrificing positioning performance. Testing results demonstrate that the mechanism has a high linearity (plusmn2.4%). A capacitive displacement sensor is integrated for detecting input displacements that are converted into output displacements via a minification ratio, allowing closed-loop controlled nanomanipulation. The MEMS-based nano-manipulators are applicable to the characterization/manipulation of nano-materials and construction of nano devices.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.002 | 0.001 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".