Dual-doped TMAH silicon etchant for microelectromechanical structures and systems applications
Why this work is in the frame
A frame that forgets how it found something cannot be audited. These are the routes that admitted this work.
Bibliographic record
Abstract
Tetra-methyl ammonium-hydroxide (TMAH), is an anisotropic silicon etchant that is gaining considerable use in silicon micromachining due to its excellent silicon etch rate, etch selectivity to masking layers, degree of anisotropy, and relatively low toxicity. However, a shortcoming of TMAH is that it aggressively etches exposed aluminum layers. A dual-doped low concentration TMAH solution is presented, which incorporates a silicate additive for aluminum passivation and an oxidizer additive for improving etch rate and surface quality. Using etch and under-etch experiments, the dual-doped 5 wt % TMAH solution is shown to have characteristics comparable to those of high concentration TMAH solutions with the added benefit of improved etch rate, smoother etched surfaces, and selectivity to silicon over aluminum. Such an etchant can find effective use in batch fabrication and integration of microelectromechanical systems within the framework of standard foundry processes.
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Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.001 | 0.001 |
| Science and technology studies | 0.000 | 0.001 |
| Scholarly communication | 0.000 | 0.001 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it