Amorphous silicon nitride deposited at 120 °C for organic light emitting display-thin film transistor arrays on plastic substrates
Bibliographic record
Abstract
Nitrogen-rich amorphous silicon nitride (a-SiNx:H) films with [N]/[Si] ratios ranging from 1.4 to 1.7 were deposited by a 13.56 MHz plasma-enhanced chemical vapor deposition method at a temperature of 120 °C. The films’ composition, dielectric constant, electrical resistivity, and breakdown voltage were evaluated. The electrical properties of a-SiNx:H films with a [N]/[Si] ratio of more than 1.6 are superior to their lower N-content counterparts. Amorphous silicon thin film transistors (TFTs) that incorporate a-SiNx:H dielectrics were fabricated on glass and plastic substrates at a maximum processing temperature of 120 °C. The TFTs exhibit effective field effect mobility of 0.5–0.8 cm2/V s, an ON current of ∼10−5 A, an ON/OFF ratio of more than 106 and a subthreshold slope of 0.5 V/dec. The performance of the transistors seems to be compatible with application of them in active–matrix organic light emitting displays.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.002 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".