Stability of nanocrystalline silicon bottom-gate thin film transistors with silicon nitride gate dielectric
Bibliographic record
Abstract
We report on the stability of nanocrystalline silicon (nc-Si) bottom-gate (BG) thin film transistors (TFTs) with various compositions of hydrogenated amorphous silicon nitride (a-SiNx:H) gate dielectric. TFTs with nitrogen-rich nitride exhibit higher output transconductance, threshold voltage stability, and effective field effect mobility (μFE) than the devices with silicon-rich gate dielectric. For example, μFE drops from 0.75to0.2cm2∕Vs when the gate dielectric composition [N]∕[Si] changes from 1.3 to 1. The corresponding threshold voltages (VT) are 4 and −2V. Following 5h electrical stress tests, the shift in threshold voltage (ΔVT) is larger for dielectrics with lower [N]∕[Si] content, regardless of the operating regime. Indeed, ΔVT in the saturation regime is considerably less and correlates with the charge concentration in the channel, i.e., ΔVT in saturation is about 2∕3 of that in the linear regime. Relaxation tests on the stressed TFTs show that the charge trapping is the instability mechanism in nc-Si BG TFTs.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".