Organometallic vapor phase epitaxy of GaAs1−xNx alloy layers on GaAs(001): Nitrogen incorporation and lattice parameter variation
Bibliographic record
Abstract
Epitaxial GaAs1−xNx alloy layers, nominally 200-nm-thick, with x up to 0.0375 were grown on GaAs(001) at temperatures Ts varying from 500 to 650 °C to investigate nitrogen incorporation and lattice parameter variations during organometallic vapor phase epitaxy from trimethylgallium, tertiarybutylarsine, and 1,1-dimethylhydrazine. Quantitative secondary ion mass spectrometry measurements (SIMS) indicate that N incorporation decreases systematically with increasing Ts to become almost negligible at 650 °C. All films are coherent with the substrate as judged by high-resolution x-ray reciprocal lattice mapping although atomic force microscopy and cross-sectional transmission electron microscopy reveal the presence of cracks in films with x>0.02. High-resolution x-ray diffraction measurements combined with SIMS analyses indicate that the lattice constant decreases linearly with increasing x following closely the predictions of Vegard’s rule for x<0.03. At higher concentrations, the lattice constant decreases more rapidly as a significant fraction of N atoms becomes incorporated in nonsubstitutional sites as demonstrated by nuclear reaction analysis.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.001 | 0.001 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.001 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".