A Low Voltage Electrostatic Micro Actuator for Large Out-of-Plane Displacement
Bibliographic record
Abstract
An electrostatic actuator is designed to move a 1 mm mirror, 58 μm out of plane at 25 volts. Large out-of-plane displacement is obtained from repulsive forces generated on four sets of comb drive fingers attached to the mirror plate in the middle. The proposed actuator is a customized design of a previous study for low voltage applications. The static modeling of the actuator was performed using a coupled-field finite element model of the actuator, including mechanical and electrical domains. Low voltage operation is achieved by decreasing the finger width and the lateral spacing, which increased the generated repulsive force at a specified voltage in a unit cell of the actuator. Decreasing the lateral spacing also enabled increasing the number of fingers, which could increase the repulsive-force, and consequently the torque and the rotation angles when the vertical gap between moving and fixed fingers is small. However, the redesigned actuator has a lower stiffness compared to the previous design. The actuator is optimized for auto-focusing applications in cell phone cameras that require voltages below 30 Volts for user safety. In the intended auto-focusing module, the actuators do not carry the lens and auto-focusing is obtained by moving the mirror attached to the actuators.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".