X-ray observation of large-diameter Cz-silicon by a 300-mm-wide monochromatic beam
Bibliographic record
Abstract
A general review will be presented of recent synchrotron white beam x-ray topography (swbxt) studies of defects in SiC single crystals carried out at Stony Brook and at the Stony Brook Synchrotron Topography Station at the National Synchrotron Light Source, Brookhaven National Laboratory.Results will be presented from studies of (a) 4h and 6h SiC substrates growth by physical vapor transport, (b) homoepitaxial layers grown on such substrates, (c) hetereoepitaxial layers grown on 4h substrates, and (d) sic device structures.Swbxt results will be correlated with those from afm, Nomarski optical microscopy, high resolution triple-axis x-ray diffraction (hrtxd), sem and tem studies carried out on the same crystals.From (a), substrate defects observed include closed-core and hollow-core screw dislocations (micropipes) in 6h and 4h, deformation-induced basal plane dislocations in 6h and 4h; and small angle boundaries in 4h.The possible origins for these defects will be discussed.Studies investigating the relationship between micropipe hollow-core diameter and the burgers vector will also be outlined, including the techniques used for burgers vector determination.From (b) results from studies of the correlation between substrate and epilayer defects in 6h/6h homoepitaxial layers will be presented.From (c) polytype mapping in 3c/4h sic heterostructures will be described.The relationship between substrate and epilayer defects will again be explored as will the lattice mismatch between epilayer and substrate as indicated by a combination of swbxt and hrtxd.In (d) examples of research exploring the influence of defects on device performance will be presented.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.001 | 0.001 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.003 | 0.001 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".