<title>Air optical breakdown on silicon as a novel method to fabricate photoluminescent Si-based nanostructures</title>
Bibliographic record
Abstract
A novel dry, vacuum-free laser-assisted method for a fabrication of nanostructured Si/SiOx layers on a silicon wafer is demonstrated. This method uses the phenomenon of air optical breakdown to modify a semiconductor surface. Pulsed radiation from a CO2 laser was focused on a silicon wafer to initiate the optical breakdown in atmospheric pressure air. After several breakdown initiations near the threshold of plasma production, a gray-tint layer was formed under the radiation spot on the silicon surface. The size of the processed area could be controlled by varying the radiation focusing conditions. Properties of the layers were studied by optical and SEM microscopies, XPS, XRD, Specular X-ray Reflectivity and PL spectroscopy. It was found that the layers had the porosity of about 75-80% and contained nanoscale holes and channels. They consisted of silicon nanocrystals embedded in SiO2 matrix and exhibited strong photoluminescence (PL) at 1.9-2.0 eV, which could be seen by naked eyes. Possible mechanisms of nanostructure formation and PL origin are discussed. The method can be used for a controlled local patterning of photoluminescent nanostructured materials.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".