<title>Air optical breakdown on silicon as a novel method to fabricate photoluminescent Si-based nanostructures</title>
Bibliographic record
Abstract
A novel dry, vacuum-free laser-assisted method for a fabrication of nanostructured Si/SiO<SUB>x</SUB> layers on a silicon wafer is demonstrated. This method uses the phenomenon of air optical breakdown to modify a semiconductor surface. Pulsed radiation from a CO<SUB>2</SUB> laser was focused on a silicon wafer to initiate the optical breakdown in atmospheric pressure air. After several breakdown initiations near the threshold of plasma production, a gray-tint layer was formed under the radiation spot on the silicon surface. The size of the processed area could be controlled by varying the radiation focusing conditions. Properties of the layers were studied by optical and SEM microscopies, XPS, XRD, Specular X-ray Reflectivity and PL spectroscopy. It was found that the layers had the porosity of about 75-80% and contained nanoscale holes and channels. They consisted of silicon nanocrystals embedded in SiO<SUB>2</SUB> matrix and exhibited strong photoluminescence (PL) at 1.9-2.0 eV, which could be seen by naked eyes. Possible mechanisms of nanostructure formation and PL origin are discussed. The method can be used for a controlled local patterning of photoluminescent nanostructured materials.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".