Characterization of neutral, positive, and negative species in a chlorine high-density surface-wave plasma
Bibliographic record
Abstract
This article reports an experimental study of the influence of the plasma parameters on the concentration of neutral and ion species in a chlorine high-density plasma sustained by surface waves. The investigation focuses on the dependence of the concentrations of Cl, Cl2, Cl+, Cl2+, Cl−, and electrons on the gas pressure in the 0.1 to 10 mTorr range, and on the intensity of a confinement magnetic field. The results show that a high dissociation degree (up to 90%) can be achieved even with a very modest power level (250 W, power density of about 2 mW/cm3), provided the pressure is low enough (i.e., less than 1 mTorr). It was also found that Cl+ is the main positive ion and that electrons are the main negative charge carrier at lower pressure. When the gas pressure is higher than a few mTorr, Cl2+ becomes dominant with Cl− as the negative charge carrier. The behavior of the positive ion and neutral species concentrations is compared to the results of a simple model based on creation–losses rate equations for the various species. It is shown that for a given magnetic field intensity, there is a critical pressure above which diffusion can be neglected in comparison with ion–ion recombination and charge transfer.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".