Characterization of Integrated Planar Photonic Crystal Circuits Fabricated by a CMOS Foundry
Bibliographic record
Abstract
Integrated planar photonic crystal circuits in silicon on insulator were fabricated with a single-etch-step process by a foundry using complementary metal-oxide-semiconductor processing techniques. The devices studied integrate three key elements: i) input/output grating couplers consisting of 2D uniform arrays of holes, ii) single transverse electric (TE)/single transverse magnetic (TM) mode channel waveguides, and iii) a photonic crystal linear three hole defect (L3) microcavity. Experimentally measured s- and p-polarized transmission, both from grating-to-grating through a uniform silicon slab region, and through the channel waveguide/L3 cavity circuit, were quantitatively compared with finite-difference time-domain simulations. Excellent agreement is achieved assuming circular, vertical side-wall holes, but this requires accurate post-fabrication characterization of actual versus nominal device parameters, including especially the silicon device layer thickness. While s-polarized incident radiation excites TE modes that exhibit typical resonant cavity (filter-like) transmission, p-polarized incident radiation excites TM modes that non-resonantly propagate through the circuit with comparable transmission efficiency. The dependence of the grating coupler tuning range on hole diameter, and the addition of a photoresist covering is determined.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.001 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".