All-metal AFM probes fabricated from microstructurally tailored Cu–Hf thin films
Bibliographic record
Abstract
A growing number of atomic force microscope (AFM) applications make use of metal-coated probes. Probe metallization can cause adverse side-effects and disadvantages such as stress-induced cantilever bending, thermal expansion mismatch, increased tip radius and limited device lifetime due to coating wear. In this study we demonstrate how to overcome these limitations using microstructural design to create a metallic glass thin film alloy, from which monostructural all-metal AFM cantilevers are fabricated. A detailed compositional study of co-sputtered Cu-Hf films is performed using x-ray diffraction (XRD), nanoindentation, four-point probe and in situ multi-beam optical stress sensing (MOSS). Metallic glass Cu(90)Hf(10) films are found to possess an optimal combination of electrical resistivity (96 microOmega cm), nanoindentation hardness (5.2 GPa), ductility and incremental stress. A continuum model is developed which uses measured MOSS data to predict cantilever warping caused by stress gradients generated during film growth. Subsequently, a microfabrication process is developed to create Cu(90)Hf(10) AFM probes. Uncurled, 1 microm thick cantilevers having lengths of 100-400 microm are fabricated, with tip radii ranging from 10 to 40 nm. As a proof of principle, these all-metal Cu-Hf AFM probes are mounted in a commercial AFM and used to successfully image a known test structure.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".