Recent Progress and Challenges in Enabling Embedded Si:C Technology
Why this work is in the frame
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Bibliographic record
Abstract
This paper discusses the fundamental challenges and reports the recent progress in enabling embedded Si:C (eSi:C) nMOS source/drain stressor technology. A thick oxide (SiON, Toxgl ~ 26Aå) long channel (Lgate in the range of 80nm-110nm, gate-pitch =336nm) nMOS device was used as the main test structure to evaluate the impact of eSi:C stressor to the device electrical characteristics, such as channel mobility and drive current. It was demonstrated that modifying the conventional Si CMOS fabrication process to accommodate the intrinsically meta-stable eSi:C material property is crucial in keeping carbon in its substitutional site thus to preserve strain in the eSi:C stressor throughout the device fabrication process. Significant channel mobility and drive current enhancement was demonstrated in the thick-oxide long-channel nMOS devices using in situ phosphorus-doped (ISPD) epitaxial eSi:C source/drain material.
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Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it