Recent Progress and Challenges in Enabling Embedded Si:C Technology
Bibliographic record
Abstract
This paper discusses the fundamental challenges and reports the recent progress in enabling embedded Si:C (eSi:C) nMOS source/drain stressor technology. A thick oxide (SiON, Toxgl ~ 26Aå) long channel (Lgate in the range of 80nm-110nm, gate-pitch =336nm) nMOS device was used as the main test structure to evaluate the impact of eSi:C stressor to the device electrical characteristics, such as channel mobility and drive current. It was demonstrated that modifying the conventional Si CMOS fabrication process to accommodate the intrinsically meta-stable eSi:C material property is crucial in keeping carbon in its substitutional site thus to preserve strain in the eSi:C stressor throughout the device fabrication process. Significant channel mobility and drive current enhancement was demonstrated in the thick-oxide long-channel nMOS devices using in situ phosphorus-doped (ISPD) epitaxial eSi:C source/drain material.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.002 | 0.001 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.001 |
| Science and technology studies | 0.000 | 0.001 |
| Scholarly communication | 0.001 | 0.002 |
| Open science | 0.001 | 0.001 |
| Research integrity | 0.001 | 0.001 |
| Insufficient payload (model declined to judge) | 0.003 | 0.001 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".