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Record W1998114622 · doi:10.1116/1.1396644

Periodic submicrometer structures by sputtering

2001· article· en· W1998114622 on OpenAlex
Brian Dick, Michael J. Brett, T. Smy, M. Belov, M. R. Freeman

Why this work is in the frame

A frame that forgets how it found something cannot be audited. These are the routes that admitted this work.

affAt least one author lists a Canadian institution in the pinned OpenAlex snapshot.

Bibliographic record

VenueJournal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001
Typearticle
Languageen
FieldMaterials Science
TopicOptical Coatings and Gratings
Canadian institutionsCarleton UniversityUniversity of Alberta
Fundersnot available
KeywordsMaterials scienceSputteringDeposition (geology)Sputter depositionMicrostructureEvaporationFabricationSubstrate (aquarium)OpticsThin filmOptoelectronicsCollimated lightNanotechnologyComposite materialPhysicsLaser

Abstract

fetched live from OpenAlex

It is known that glancing angle deposition (GLAD) utilizing extreme self-shadowing during film growth can produce periodic microstructures on a predefined seed layer using electron-beam evaporation. This deposition process has been applied to the fabrication of periodic arrays of magnetic pillars and has possible applications in optical devices. Critical to the production of these microstructures is adherence to a narrow angular flux distribution centered at an oblique incidence angle, and optimizing the seed pattern for the desired film characteristics. In this article, a low-pressure, long-throw collimated GLAD sputter deposition has been used to fabricate submicrometer scale periodic pillar and quasihelical microstructures over a range of seed separations (e.g., 150, 300, 600, 900, and 1200 nm) and deposition angles (82.5° and 86° with respect to the substrate normal). We have found that for fixed deposition parameters, periodic quasihelical growth degenerates into pillars as the seed separation increases, and that the transitional region over which this degeneration occurs shifts to high seed separations with increasing flux incidence angles. This and other growth trends are also observed and described using the three-dimensional (3D) ballistic simulator, 3D-FILMS, which has proven to be successful in simulating the growth of aperiodic and periodic GLAD films. The use of sputtering for periodic GLAD simplifies the process control, and should enable deposition of a broader range of materials for diverse applications including magnetics, optics, and sensors.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.001
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.034
Threshold uncertainty score0.903

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0010.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0010.001
Science and technology studies0.0010.001
Scholarly communication0.0010.001
Open science0.0010.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.011
GPT teacher head0.229
Teacher spread0.218 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it