Periodic submicrometer structures by sputtering
Bibliographic record
Abstract
It is known that glancing angle deposition (GLAD) utilizing extreme self-shadowing during film growth can produce periodic microstructures on a predefined seed layer using electron-beam evaporation. This deposition process has been applied to the fabrication of periodic arrays of magnetic pillars and has possible applications in optical devices. Critical to the production of these microstructures is adherence to a narrow angular flux distribution centered at an oblique incidence angle, and optimizing the seed pattern for the desired film characteristics. In this article, a low-pressure, long-throw collimated GLAD sputter deposition has been used to fabricate submicrometer scale periodic pillar and quasihelical microstructures over a range of seed separations (e.g., 150, 300, 600, 900, and 1200 nm) and deposition angles (82.5° and 86° with respect to the substrate normal). We have found that for fixed deposition parameters, periodic quasihelical growth degenerates into pillars as the seed separation increases, and that the transitional region over which this degeneration occurs shifts to high seed separations with increasing flux incidence angles. This and other growth trends are also observed and described using the three-dimensional (3D) ballistic simulator, 3D-FILMS, which has proven to be successful in simulating the growth of aperiodic and periodic GLAD films. The use of sputtering for periodic GLAD simplifies the process control, and should enable deposition of a broader range of materials for diverse applications including magnetics, optics, and sensors.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.002 | 0.001 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".