Periodic submicrometer structures by sputtering
Why this work is in the frame
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Bibliographic record
Abstract
It is known that glancing angle deposition (GLAD) utilizing extreme self-shadowing during film growth can produce periodic microstructures on a predefined seed layer using electron-beam evaporation. This deposition process has been applied to the fabrication of periodic arrays of magnetic pillars and has possible applications in optical devices. Critical to the production of these microstructures is adherence to a narrow angular flux distribution centered at an oblique incidence angle, and optimizing the seed pattern for the desired film characteristics. In this article, a low-pressure, long-throw collimated GLAD sputter deposition has been used to fabricate submicrometer scale periodic pillar and quasihelical microstructures over a range of seed separations (e.g., 150, 300, 600, 900, and 1200 nm) and deposition angles (82.5° and 86° with respect to the substrate normal). We have found that for fixed deposition parameters, periodic quasihelical growth degenerates into pillars as the seed separation increases, and that the transitional region over which this degeneration occurs shifts to high seed separations with increasing flux incidence angles. This and other growth trends are also observed and described using the three-dimensional (3D) ballistic simulator, 3D-FILMS, which has proven to be successful in simulating the growth of aperiodic and periodic GLAD films. The use of sputtering for periodic GLAD simplifies the process control, and should enable deposition of a broader range of materials for diverse applications including magnetics, optics, and sensors.
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Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.001 | 0.001 |
| Science and technology studies | 0.001 | 0.001 |
| Scholarly communication | 0.001 | 0.001 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it