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Record W1998485057 · doi:10.1063/1.373618

Vacuum ultraviolet to visible emission from hydrogen plasma: Effect of excitation frequency

2000· article· en· W1998485057 on OpenAlex

Why this work is in the frame

A frame that forgets how it found something cannot be audited. These are the routes that admitted this work.

affAt least one author lists a Canadian institution in the pinned OpenAlex snapshot.

Bibliographic record

VenueJournal of Applied Physics · 2000
Typearticle
Languageen
FieldEngineering
TopicPlasma Diagnostics and Applications
Canadian institutionsUniversité de MontréalPolytechnique Montréal
Fundersnot available
KeywordsPlasmaAtomic physicsExcitationRange (aeronautics)UltravioletTorrChemistryPlasma etchingHydrogenMaterials scienceEtching (microfabrication)OptoelectronicsPhysics

Abstract

fetched live from OpenAlex

The expanding use of low pressure (p⩽10 Torr), high frequency plasmas in various applications has stimulated research toward increased operating efficiency. In order to optimize a particular plasma process, the operator can vary several “external” (operator-set) parameters, among which the excitation frequency f has received relatively little attention in the literature over the years, probably due to the difficulties encountered in designing meaningful frequency-dependent experiments. These difficulties can be avoided by the use of surface-wave discharges (SWDs), which possess great flexibility: a very broad (continuous) range of excitation frequencies, and wide ranges of operating pressures and plasma densities, under noncritical, almost perfect impedance matching with the power source. In earlier work in these laboratories, we have examined the f dependence of plasma deposition and etching experiments; the present experiments have been designed to investigate the f dependence more “directly” by turning to the plasma through its optical emission. The vacuum ultraviolet to visible emission from SWD plasmas in pure hydrogen or 7%H2 in Ar mixture has been investigated over a broad range of excitation frequency (50⩽f⩽200 MHz) using a spectrophotometer with a known transfer function. The observed f dependence of emission intensity (atomic lines and molecular bands) as f is increased is interpreted in the case of the pure H2 discharge in terms of changes from a nonstationary to a stationary electron energy distribution function (EEDF) while, in the 7%H2/Ar mixture, it is related to changes in the form of the stationary EEDF.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.226
Threshold uncertainty score0.447

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0000.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.005
GPT teacher head0.210
Teacher spread0.205 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it