Deep-ultraviolet-induced damage of charge coupled device sensors
Bibliographic record
Abstract
In order to facilitate the inspection of deep-submicron features, a generation of semiconductor inspection systems are being pushed to image using deep-ultraviolet (UV) sensitive cameras at increasingly shorter wavelengths. In this article, we present a deep-UV sensitive thinned front-illuminated linear charge coupled device (CCD) image sensor structure and investigate its behavior after exposure to F2 (λ=157 nm) excimer laser. Two key manifestations of radiation damage are observed: (1) Extrinsic quantum efficiency drifts with increasing 157 nm exposure, and (2) dark current increases almost exponentially with 157 nm exposure. These fluctuations in CCD parameters can be caused by several factors including UV-induced color center formation in the oxide, charge generation in the oxide, interface modification, and structural rearrangement. These UV-induced effects alter the optical and electrical properties of the oxide and Si–SiO2 interface, resulting in both temporal and permanent shifts in device performance. The experimental results suggest that careful control of the oxide thickness and the Si–SiO2 interface quality are critical for realizing CCD sensors with high responsivity and stability for deep-UV imaging.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.001 | 0.000 |
| Bibliometrics | 0.001 | 0.002 |
| Science and technology studies | 0.000 | 0.001 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.000 | 0.001 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".