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Record W2001128371 · doi:10.1116/1.1486005

Study of the properties of thin films of silicon nitride and silicon oxide using effective medium theories

2002· article· en· W2001128371 on OpenAlex
Redhouane Henda

Why this work is in the frame

A frame that forgets how it found something cannot be audited. These are the routes that admitted this work.

affAt least one author lists a Canadian institution in the pinned OpenAlex snapshot.

Bibliographic record

VenueJournal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2002
Typearticle
Languageen
FieldEngineering
TopicSurface Roughness and Optical Measurements
Canadian institutionsLaurentian University
Fundersnot available
KeywordsSilicon nitrideMaterials sciencePercolation (cognitive psychology)SiliconSilicon oxidePercolation theoryOxideThin filmChemical vapor depositionCondensed matter physicsNanotechnologyOptoelectronicsPhysicsChemistryPhysical chemistryMetallurgy

Abstract

fetched live from OpenAlex

Effective medium theories (EMTs) find widespread applications in the general area of condensed matter. In this article, EMTs are used to investigate the properties of thin films of silicon nitride (SiNx) and silicon oxide (SiOx) produced by the low-pressure chemical vapor deposition technique. Experimental data on the technologically important properties, such as the optical constants and density, of these materials are compared with theoretical predictions using Clausius–Mossotti, Maxwell-Garnett, and Bruggemann equations. For both materials, the results show a good agreement between theoretical predictions as obtained from the solution of the Bruggemann equation and the experimental data up to the percolation threshold. The experimental results agree fairly well with the calculated results obtained through the solution of the Maxwell-Garnett equation, but the latter fails to predict the transition present in the composition versus optical constant curves of both materials.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.001
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.027
Threshold uncertainty score0.514

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0010.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0010.000
Bibliometrics0.0000.001
Science and technology studies0.0000.001
Scholarly communication0.0000.000
Open science0.0010.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.021
GPT teacher head0.230
Teacher spread0.209 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it