Deep Levels in As-Grown 4H-SiC Epitaxial Layers and their Correlation with CVD Parameters
Bibliographic record
Abstract
Abstract. Nitrogen doped 4H-SiC epitaxial layers grown by hot-wall chemical vapor deposition were investigated by deep level transient spectroscopy in the as-grown state. Besides the Z1,2 defect level at EC- 0.66 eV, that seems to be omnipresent, four other electron traps labeled IL1 to IL4 with ionization energies between 0.87 and 1.31 eV could be detected. The dependence of the deep level concentrations on the incorporated N concentration ranging from few 1014 to some 1015 cm-3 and the C/Si ratio (1.2¸3) was examined. The concentration of both Z1,2 and IL1 increases with increa-sing N doping. For medium C/Si ratios this dependence is linear for Z1,2 and quadratic for IL1. High C/Si ratios enhance the formation of Z1,2 while they suppress that of IL1. These results suggest a complex of interstitial C and N on carbon site (Ci-NC) for Z1,2 and a nitrogen pair (NC-Ni) for IL1. However, other possibilities like Si vacancy related defects cannot be ruled out at present.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".