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Record W2001951901 · doi:10.1063/1.1446232

Electron energy loss spectroscopy of interfacial layer formation in Gd2O3 films deposited directly on Si(001)

2002· article· en· W2001951901 on OpenAlexaff
Gianluigi A. Botton, J. A. Gupta, D. Landheer, J. P. McCaffrey, G. I. Sproule, M. J. Graham

Bibliographic record

VenueJournal of Applied Physics · 2002
Typearticle
Languageen
FieldEngineering
TopicSemiconductor materials and devices
Canadian institutionsInstitute for Microstructural SciencesNatural Resources Canada
Fundersnot available
KeywordsElectron energy loss spectroscopyX-ray photoelectron spectroscopySputteringAnnealing (glass)SpectroscopyTransmission electron microscopyElectron spectroscopyAnalytical Chemistry (journal)Materials scienceSiliconThin filmSpectral lineK-edgeChemical bondChemistryNanotechnologyNuclear magnetic resonanceOptoelectronics

Abstract

fetched live from OpenAlex

High-resolution transmission electron microscopy and electron energy loss spectroscopy (EELS) were used to study the interfacial layers formed in Gd2O3 films on Si(001) during rapid thermal annealing at 780 °C in an O2 ambient. Oxygen diffuses through the films and reacts with the substrate to form a SiO2 layer and an intermediate layer containing Gd2O3 and SiO2. Singular value decomposition was used to profile the Si, SiO2, and Gd2O3 components through the film from the characteristic spectra observed in the Si L2,3, Gd N4,5 and O K-edge EELS. The profiling results support the results of x-ray photoelectron spectroscopy sputter profiling measurements and contribute to a complete picture of the chemical bonding within the films. The ab initio multiple scattering method was used to simulate the observed EELS spectra at the Si L2,3 and O K edges and provide further insight into the chemical bonding of the film and the origin of spectral features. For SiO2, the Si L2,3 EELS is due only to the first-neighbor oxygen atoms. The O K-edge EELS for Gd2O3 is also due only to Gd first neighbors, while the SiO2 EELS is very sensitive to the number of O second neighbors as well as the Si first neighbors.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

How this classification was reachedexpand

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.008
Threshold uncertainty score0.450

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0000.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.011
GPT teacher head0.212
Teacher spread0.201 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Classification

machine, unvalidated

Machine predicted; a candidate call from one teacher head, not a consensus.

The models applied no category: nothing in the taxonomy fit this work.
Study designBench or experimental
Domainnot available
GenreEmpirical

How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".

Quick stats

Citations36
Published2002
Admission routes1
Has abstractyes

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