Electrical probe calibration and power calculation for a miniature 13.56 MHz plasma source
Bibliographic record
Abstract
The paper highlights and provides solutions to the difficulties encountered with electrical probe measurements performed on a miniature, high capacitive impedance plasma device excited at 13.56 MHz. It is shown that a proper calibration of the phase angle between the circuit current and load voltage signals is required when commercial capacitive voltage probes (Tektronix P6139A and P5100 models) are used. A method to calculate the electrical characteristics of the plasma source and accounting for this calibration is described. The P6139A probe, which has the largest input capacitance and shortest cable length, introduced the smallest phase angle (−2 ± 1°), while the P5100 probe, which is used for higher input voltages and has a longer cable length, introduced a considerably larger phase angle (−34 ± 1°) for typical resistive loads. Simple circuit models are developed in an attempt to isolate the phase induced by the probe capacitance and cable length. The application of the proposed calibration to a miniature atmospheric pressure glow discharge source considerably reduced the error in the calculation of the power dissipated in the plasma device, though it remained relatively high (1 W ± 42%) due to the highly capacitive nature of the device.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.003 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.001 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.001 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.001 | 0.001 |
| Insufficient payload (model declined to judge) | 0.002 | 0.001 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".